LSPL GROUP LASER SURFACE PROCESSING LABORATORY

Facilities at the LSPL 1 kW CO2 laser 10 W KrF excimer laser Laser-CVD reactor PLD reactor Vacuum and inert atmosphere annealing furnaces X-ray diffractometer (Bragg-Brentano and glancing incidence) Optical emission spectrometer Quadrupole mass spectrometer Optical profilometer Optical microscope

Other accessible facilities SEM/EDS TEM AFM Micro-Raman spectrometer Auger/XPS spectrometer Two-wavelength ellipsometer